Automated Industrial AFM for In-line Flat Panel Inspection and Metrology

Atomic Force Microscopy (AFM) is emerging as an essential tool in many industries. With its ability to accurately measure critical dimensions in the micrometer to nanometer regime, the AFM is becoming an essential tool choice in flat panel applications such as surface roughness, channel height and width measurement, and column/pitch spacer characterization. The XE-LCD is a completely automated AFM/SPM system designed for characterization of flat panel displays as either an in-line or off-line inspection tool.

High Throughput Inline Automation
  • Automatic navigation and measurement control
  • Automatic data acquisition and analysis of display device features
  • Automatic handling of large size panel up to 2400 mm x 2100 mm
  • Automatic tip exchange (Optional)

True Non-Contact Mode^TM and Longer Tip Life Reduces Cost of Ownership
  • 10 times or longer tip life for general purpose & defect imaging
  • Less tip wear for prolonged high-quality and high-resolution imaging
  • Minimized sample damage or modification
  • Immunity from parameter-dependent results observed in tapping imaging

Artifact Free Metrology by Crosstalk Elimination
  • Unique decoupled XY scanning system provides a flat scanning stage
  • Flat and linear XY scan removes artifacts from background curvature
  • Accurate feature measurements with industry leading gauge sigma
  • Superior tool to tool matching

Nanotechnology Solutions Partner
  • Trusted partnership with customers to meet the fast changing requirements
  • Application specific solutions that maximize throughput
  • Modular software and hardware platform enable rapid response