Automated Industrial AFM for Metrology of Read/Write Heads.

The XE-PTR provides Automatic Pole Tip Recession measurements for PMR sliders with nanoscale accuracy, repeatability, and high throughput, thus improving the overall yield. The XE-PTR is the perfect solution for slider manufacturers who, until now, had very limited choices for industrial grade in-line inspection tools for HDD slider metrology.

Our Programmable Data Density feature enables faster imaging by automatically adjusting the scanning pixel density to reflect the relative size of the feature being scanned. As a result, users generate images with highly detailed regions of interest within larger macrostructures, all in one scan. In addition, our crosstalk eliminated (XE) scan system and True Non-Contact ModeTM allow for truly flat scans while simultaneously prolonging high resolution scans and tip life.

Process engineers need a tool that provides accurate and automatic Pole Tip Recession (PTR) measurements for HDD sliders. Unfortunately, PTR measurements typically require multiple AFM scans - a macroscale reference scan along with higher-resolution scans of smaller regions of interest. This multi-scan process takes time and limits throughput.

Fully Automated Industrial In-line AFM for Slider Metrology
  • Automatic data acquisition and slider metrology analysis 
  • Allowable sample type: rowbars and sliders
  • Automatic tip exchange (optional)
  • Automatic tilting stage (optional)

Artifact-Free Metrology by Crosstalk Elimination
  • Unique decoupled XY scanning system provides a flat scanning stage
  • Flat and linear XY scan removes artifacts from background curvature
  • Accurate height and angle measurements with PTR Gauge Repeatability of less than 0.1 nm (1 sigma)
  • Superior tool to tool matching.

True Non-Contact Mode^TM Maintains a Sharp Tip for High-resolution Imaging
  • Less tip wear for prolonged high-quality and high-resolution imaging
  • Minimized sample damage or modification
  • Immunity from parameter-dependent results observed in tapping imaging

High Throughput Feature Measurement by Programmable Data Density (PDD)
  • Faster imaging of the region of interest by variable pixel density
  • Automatically detects and acquires high resolution image of small region of interest
  • Obtains PTR, writer pole, and other features, All In One image scan

Nanotechnology Solutions Partner
  • Trusted partnership with customers to meet the fast changing requirements
  • Application specific solutions that maximize throughput
  • Modular software and hardware platform enable rapid response