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Automatic Defect Review AFM for Hard Disk Media and Substrates
The XE-HDM makes it possible
for the substrate & media manufacturers to monitor the flattest
substrates being developed for the HDD industry. |
By delivering the industry
lowest noise floor (less than 0.5 A) and combining it with True Non-Contact
Mode, the XE-HDM makes it possible to acquire consistent, repeatable,
and reproducible sub-nanoscale roughness measurements. |
Suppliers to the HDD industry
are developing ultra-flat substrates to address the ever-increasing
need for reduced slider flying height. However, there has never been
a metrology tool capable of providing accurate and reliable measurements
for the sub-nanoscale roughness of these substrates. |
The new XE-HDM significantly
increases throughput for the defect review process; test runs with
real defects demonstrate a 10x increase in throughput for defect review
in an automated process when compared with more traditional methods
of defect review. |
Park Systems XE-HDM is
an automatic defect review AFM that speeds and improves the way defects
in HDD substrates and media are identified, scanned, and analyzed. |
For researchers working
with hard disk media and other flat substrates, the process of
identifying nanoscale defects is time consuming with conventional
tools, hindering throughput. |
Artifact Free Metrology by Crosstalk Elimination
• Unique decoupled XY scanning system provides a flat scanning stage
• Flat and linear XY scan removes artifacts from background curvature
• Accurate feature measurements with industry leading gauge statistics
• Superior tool to tool matching
True Non-Contact ModeTM and Longer Tip Life Reduces Cost of Ownership
• 10 times or longer tip life for general purpose & defect imaging
• Less tip wear for prolonged high-quality and high-resolution imaging
• Minimized sample damage or modification
• Immunity from parameter-dependent results observed in tapping imaging
Automatic Defect Review for Media and Substrates
• Automated survey scan of defects mapped by optical inspection tools
• Automated zoom-in scan of specified defects
• Automated profiling of imaged defect types
• Automated analysis of imaged defects
• HGA fixture and sample tilting stage (optional)
Nanotechnology Solutions Partner
• Trusted partnership with customers to meet the fast changing requirements
• Application specific solutions that maximize throughput
• Modular software and hardware platform enable rapid response
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Research
AFM
