Artifact Free Metrology by Crosstalk Elimination
  • Unique decoupled XY scanning system provides a flat scanning stage
  • Flat and linear XY scan removes artifacts from background curvature
  • Accurate feature measurements with industry leading gauge statistics
  • Superior tool to tool matching

True Non-Contact Mode^TM and Longer Tip Life Reduces Cost of Ownership
  • 10 times or longer tip life for general purpose & defect imaging
  • Less tip wear for prolonged high-quality and high-resolution imaging
  • Minimized sample damage or modification
  • Immunity from parameter-dependent results observed in tapping imaging

Automatic Defect Review for Media and Substrates
  • Automated survey scan of defects mapped by optical inspection tools
  • Automated zoom-in scan of specified defects
  • Automated profiling of imaged defect types
  • Automated analysis of imaged defects
  • HGA fixture and sample tilting stage (optional)

Nanotechnology Solutions Partner
  • Trusted partnership with customers to meet the fast changing requirements
  • Application specific solutions that maximize throughput
  • Modular software and hardware platform enable rapid response