Premier Cross-Functional AFM with Motorized Sample Stage

With the arrival of the XE-150, Park Systems’ large sample AFM, Non-Contact AFM imaging has become the most feasible and practical way to scan your large samples with ultimate AFM resolution and reliability. The XY motorized sample stage is optimized for both small and large sample placement, 150 mm × 150 mm, and allows full travel over the entire sample. Also, the Step-and-Scan automated sample measurement greatly minimizes user’s required presence during system operation

Artifact Free Imaging by Crosstalk Elimination
  • Two independent, closed-loop XY and Z flexure scanners for sample and tip
  • Flat and linear XY scan of 100 μm x 100 μm with low residual bow
  • Out of plane motion of less than 2 nm over entire scan range
  • Up to 25 μm Z-scan by high force scanner
  • Accurate height measurements

Ultimate AFM Resolution by True Non-Contact Mode^TM
  • 10 times larger Z-scan bandwidth than a piezotube
  • Less tip wear for prolonged high-quality and high-resolution imaging
  • Minimized sample damage or modification
  • Immunity from parameter-dependent results observed in tapping imaging

User Convenience by EZ Design
  • Open side access for easy sample or tip exchange
  • Dovetail-lock mount for easy head removal
  • Direct on-axis optics for high resolution optical viewing
  • Motorized optics stage

Advanced Option Compatibility with Modular Platform
  • Full SPM modes and options
  • Open side access for optical coupling
  • Automated sample measurements with motorized sample stage
  • Full travel range over 150 mm wafer (No sample rotation required)