Fully Automated Industrial In-line AFM for Slider Metrology
• Automatic data acquisition and slider metrology analysis
• Allowable sample type: rowbars and sliders
• Automatic tip exchange (optional)
• Automatic tilting stage (optional)
Artifact-Free Metrology by Crosstalk Elimination
• Unique decoupled XY scanning system provides a flat scanning stage
• Flat and linear XY scan removes artifacts from background curvature
• Accurate height and angle measurements with PTR Gauge Repeatability of less than 0.1 nm (1 sigma)
• Superior tool to tool matching.
True Non-Contact ModeTM Maintains a Sharp Tip for High-resolution Imaging
• Less tip wear for prolonged high-quality and high-resolution imaging
• Minimized sample damage or modification
• Immunity from parameter-dependent results observed in tapping imaging
High Throughput Feature Measurement by Programmable Data Density (PDD)
• Faster imaging of the region of interest by variable pixel density
• Automatically detects and acquires high resolution image of small region of interest
• Obtains PTR, writer pole, and other features, All In One image scan
Nanotechnology Solutions Partner
• Trusted partnership with customers to meet the fast changing requirements
• Application specific solutions that maximize throughput
• Modular software and hardware platform enable rapid response
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