Nanoscale Accuracy and Repeatability

Global competition and market needs are driving the hard disk drive (HDD) and semiconductor manufacturers to smaller and more complex device structures that defy measurement by conventional metrology tools. The HDD makers need defect-free substrate and media to reach the goal of 10 terabytes per square inch. The semiconductor manufacturers are pushing towards 10 nanometer node technologies.

Park understands the needs for an advanced atomic force microscope (AFM) that delivers greater accuracy in characterizing smaller and more complex devices. Park recognizes that the accuracy, productivity and reliability of an AFM must come with an affordable lifecycle cost by minimizing the number of tip replacements. Park has partnered with its customers to deliver the AFM performance that keeps pace with the development and process needs. This is how Park has become the AFM of choice in the hard disk drive industry.

Park’s long history in AFM technology advances has led the way for AFM imaging at the nanoscale. As the favored nanotechnology solutions partner for research and industry, Park offers innovations in scan accuracy, measurement repeatability, tip life, ease of use and service, providing maximum benefit at the lowest cost of ownership. Park is the technology partner who will ensure AFM solutions for the latest development, production, and failure analysis challenges in the hard disk drive and semiconductor industries.

Fully Automated AFM for In-Fab Metrology

Park offers fully-automated Atomic Force Microscopy systems designed for process monitoring and characterization of critical topographies such as step heights, surface roughness, overhang and trench profiles, sidewall roughness, and critical angle measurements. Using an ultra-sharp tip that maintains its shape via True Non-Contact imaging mode, the Park AFM create a high-resolution reconstruction of surfaces and three dimensional structures.

- Feature Identification by Pattern Recognition
- Automatic XY Stage Coordinate Navigation
- Automatic Measurement Control
- Automatic Data Analysis & Export
- Automatic Wafer Handling up to 300 mm
- Automatic Tip Exchange
- Class 1 Cleanroom Micro-Environment
- Compatible with SEC II, GEM, and SMIF

Park's inline control software carries out the automated AFM measurement of a sample following the preset procedure written in a recipe file for data acquisition, analysis, and export. Supporting auto, semi-auto, and manual modes, the inline software allows you to perform various system-wide functions such as editing a measurement method for each step of an automated measurement procedure, loading a recipe file, commencing automated measurements, monitoring a measurement process, and obtaining measurement data.

PARK SYSTEMS RELIABILITY

Correlation

Thanks to its revolutionary platform designed for industrial metrology, the Park AFM will correlate with any existing Park AFM solutions that have been previously used for manufacturing, inspection, analysis, or research.

System Uptime

Park engineers and scientists adopted the most rigorous industry standard of product development to ensure the highest level of system reliability. Park AFM solutions can be seamlessly incorporated as either an inline or offline inspection tool with minimal maintenance requirements.

Service & Maintenance

Park is committed to the highest level of service and support, and every effort is made to understand our industrial customers' needs. Park places the utmost importance on meeting promised delivery dates, guaranteed quality, and faithful after-sales service.