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SSRM

For optimal performance with our AFM systems please request a quote from Park Systems. Mounted cantilevers are additionally tested. All probes that are not listed here from Nanosensors™, Nanotools GmbH, Nanoworld AG, BudgetSensors, Olympus Corp., MikroMasch, Applied Nano Structures, Inc. are possible to order from our probe store. Probes from other manufacturers also can be possible to order upon request for quotation. The peformance of probes ordered from other sources are not guaranteed.

Probe Force Constant (N/m) Frequency (kHz ) Manufacture Short Description Quote
CDT-NCHR 80 400 Nanosensors ▪ Cantilever suitable for SSRM/lithography
▪ Backside reflex coating (Al)
▪ Electrically conductive diamond-coated tip
▪ Mounted type on Conductive AFM (CP-AFM) Chip Carrier
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Property Nominal Value Specified Range
Thickness /µm 4 3.0 - 5.0
Mean Width /µm 30 22.5 - 37.5
Length /µm 125 115 - 135
Force Constant /(N/m) 80 23 - 225
Resonance Frequency /kHz 400 225 - 610
CAMS FDP 27
11
3
  imec ▪ Full diamond probes for SSRM
▪ Solid boron-doped polycrystalline diamond tip
▪ 3 cantilevers with different spring constants on a chip
▪ Mounted type on Conductive AFM (CP-AFM) Chip Carrier
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Cantilevers Spring Constant
(N/m)
Length
(µm)
Width
(µm)
Thickness
(µm)
nominal range nominal nominal ±1
Short 27 14-47 225 50 5
Medium 11 5-19 305 50 5
Long 3 1-6 465 50 5


 

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