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Probe Store - Nanolithography

* We do not guarantee the performance of probes ordered directly from the manufacturer; for optimal performance with our AFM systems please request a quote from Park Systems.

Probe Force Constant (N/m) Frequency (kHz ) Manufacture Short Description Quote
DT-NCHR 42 330 Nanosensors ▪ Cantilever with high force constant for Lithography, Backside reflex coating
▪ Diamond-coated tip, REQUIRES Teflon-coated chip carrier
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NANOSENSORS™ DT-NCHR probes are designed for non-contact mode or tapping mode AFM (also known as: attractive or dynamic mode). This probe type combines high operation stability with outstanding sensitivity and fast scanning ability.
For applications that require hard contact between tip and sample this SPM probe offers a real diamond tip-side coating. This coating features extremely high wear resistance due to the unsurpassed hardness of diamond. The typical macroscopic tip radius of curvature lies is between 100 and 200 nm. Nanoroughnesses in the 10 nm regime improve the resolution on flat surfaces.

Property Nominal Value Specified Range
Thickness /µm 4 3.0 - 5.0
Mean Width /µm 30 22.5 - 37.5
Length /µm 125 115 - 135
Force Constant /(N/m) 80 23 - 225
Resonance Frequency /kHz 400 225 - 610
Multi75E 3 75 Budget Sensors ▪ Cantilever with lower force constant, REQUIRES Teflon-coated chip carrier
▪ Conductive tip for electric application, Coated with Cr-Pt
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Rotated Monolithic silicon probe
Symmetric tip shape
Chipsize 3.4 x 1.6 x 0.3 mm

  value range
Resonant Frequency 75 kHz ± 15 kHz
Force Constant 3 N/m 1 N/m to 7 N/m
Length 225 µm ± 10 µm
Mean Width 28 µm ± 5 µm
Thickness 3 µm ± 1 µm
Tip Height 17 µm ± 2 µm
Tip Set back 15 µm ± 5 µm
Tip Radius < 25 nm
Coating Conductive Cr/Pt on both sides
Half Cone Angle 20°-25° along cantilever axis
25°-30° from side
10° at the apex
Contact Resistance 300 Ohms on platinum thin film surface
CDT-CONTR 0.2 13 Nanosensors ▪ Contact contact cantilever for Lithography based on oxidation, Backside reflex coating
▪ Electrically conductive diamond-coated tip, REQUIRES Teflon-coated chip carrier
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NANOSENSORS™ CDT-CONTR probes are designed for contact mode (repulsive mode) SPM imaging. For applications that require a wear resistant and an electrically conductive tip we recommend this type. Some applications are Tunneling AFM and Scanning Capacitance Microscopy (SCM). The CDT Diamond Coating is highly doped and the total resistance measured in contact to a platinium surface is < 10 kOhm.
Property Nominal Value Specified Range
Thickness /µm 2 1.0 - 3.0
Mean Width /µm 50 42.5 - 57.5
Length /µm 450 440 - 460
Force Constant /(N/m) 0.5 0.1 - 1.7
Resonance Frequency /kHz 20 11 - 29
CDT-NCHR 42 330 Nanosensors ▪ Cantilever with high resonant frequency for Lithography, Backside reflex coating
▪ Electrically conductive diamond-coated tip, REQUIRES Teflon-coated chip carrier
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NANOSENSORS™ CDT-NCHR probes are designed for non-contact mode or tapping mode AFM (also known as: attractive or dynamic mode). This sensor type combines high operation stability with outstanding sensitivity and fast scanning ability. For applications that require a wear resistant and an electrically conductive tip we recommend this type. Some applications are Tunneling AFM and Scanning Capacitance Microscopy (SCM). The CDT Diamond Coating is highly doped and the total resistance measured in contact to a platinium surface is < 10 kOhm. The typical macroscopic tip radius of curvature is between 100 and 200 nm. Nanoroughness in the 10 nm regime improves the resolution on flat surfaces.

Property Nominal Value Specified Range
Thickness /µm 4 3.0 - 5.0
Mean Width /µm 30 22.5 - 37.5
Length /µm 125 115 - 135
Force Constant /(N/m) 80 23 - 225
Resonance Frequency /kHz 400 225 - 610
Platinum 18 14 - ▪ Contact cantilever made of solid platinum
▪ Recommended for high voltage/current application above ±10 V or 1 µA
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The solid platinum probe, whose tip radius is smaller than 20nm, shows better performance than a typical metal-coated probes.

Technical Data Nominal Value Specified Range
Width (µm) 100 90 - 110
Length(µm) 300 250 – 350
Force Constant(N/m) 18 10.8 -25.2
Resonance Frequency (kHz) 14 9.8 – 18.2


 

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