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    AFM Specifications

Park NX20 Specifications

XY Scanner

Single-module flexure XY scanner with closed-loop control
Scan range : 100μm x 100μm
                         50μm x 50μm
                         25μm x 25μm
20-bit position control and 24-bit position sensor


Motorized Stage

XY travel range : 150 mm (200 mm optional)
Z travel range : 25 mm
Focus travel range : 9 mm
Precision encoder for all axes (optional)

Z Scanner

Guided high-force Z scanner
Scan range : 15 µm
                         30 µm
20-bit position control and 24-bit position sensor


Sample Mount

Up to 150 mm (200 mm optional)
Vacuum grooves to hold wafer samples



Objective Lens

10× (0.21 NA) objective lens with ultra-long working distance
20× (0.42 NA) objective lens with long working distance and high resolution
Direct on-axis vision of sample surface and cantilever
Coupled with 10× objective lens (20× optional)
Field-of-view : 840 × 630 µm
CCD : 5M pixel




Dedicated system control and data acquisition software
Adjusting feedback parameters in real time
Script-level control through external programs(optional)


AFM data analysis software



Signal processing

ADC : 18 channels
4 high-speed ADC channels (64 MSPS)
24-bit ADCs for X, Y, and Z scanner position sensor
DAC : 12 channels
2 high-speed DAC channels (64 MSPS)
20-bit DACs for X, Y, and Z scanner positioning
Maximum data size : 4096 x 4096 pixels

Integrated functions

3 channels of flexible digital lock-in amplifier
Digital Q control

External signal access

20 embedded signal input/output ports
5 TTL outputs : EOF, EOL, EOP, Modulation, and AC bias


AFM Modes
(*Optionally available)

Standard Imaging

True Non-Contact AFM
PinPoint™ AFM
Basic Contact AFM
Lateral Force Microscopy (LFM)
Phase Imaging
Intermittent (tapping) AFM

Electrical Characterization*

Scanning Capacitance Microscopy (SCM)
Conductive AFM
Electric Force Microscopy (EFM)
Piezoresponse Force Microscopy (PFM)
Scanning Kelvin Probe Microscopy (SKPM)

General Characterization*

Magnetic Force Microscopy (MFM)
Scanning Thermal Microscopy (SThM)
FD Spectroscopy
Scanning Tunneling Microscopy (STM)
Force Modulation Microscopy (FMM)


NX20 AFM Options

Customize your AFM to handle any project

Automatic data collection and analysis lets you save time


The NX20 features Park's automation control software that automatically carries out AFM measurements of a sample according to your preset procedure (recipe). It can accurately collect data, perform pattern recognition, and do analysis using its onboard Cognex board and optics module, and export with almost no user input so you have more time to do innovative research.

Sample Tilting Stage for Sidewall Imaging lets you see more


The NX20’s innovative architecture lets you detect the sidewall and surface of the sample, and measure their angle. This gives the unit the versatility you need to do more innovative research and gain deeper insights.

Acoustic Enclosure with Temperature Stabilization

Innovative control brings the system quickly to its temperature equilibrium
Temperature stability of less than 0.05 °C within10 minutes of closing AE door
Includes an active vibration isolation system

Encoders for Motorized Stage

The encoded XY stage travels in 1 µm resolution with 2 µm repeatability
The encoded Z stage travels in 0.1 µm resolution with 1 µm repeatability

Sample Plates

Dedicated small sample holder for electrical measurements
Vacuum grooves to hold wafers
Sample dimension: Up to 200 mm (150 mm default)

Clip-type Chip Carrier

Can be used with an unmounted cantilever
Tip bias function available for Conductive AFM and EFM Tip bias range : -10 V ~ +10 V
Tip bias range : -10 V ~ +10 V

Precise Temperature Control

Heating & Cooling Stage (-25 ~180 °C)
250 °C Heating Stage
600 °C Heating Stage


Dimensions in mm


Park NX20 - Specifications | Park Atomic Force Microscope