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  • Park
    HDM Series
    AFM Specifications
  • NX-HDM
  • XE-HDM
 

Park NX-HDM Specifications

System
Specification

Motorized XY stage

travels up to 150 mm × 150 mm, 2 µm repeatability


Motorized Z stage

25 mm Z travel distance
0.1 µm resolution, < 1 µm repeatability


Motorized Focus Stage

15 mm Z travel distance for on-axis optics

Sample Thickness Allowance

up to 20 mm


Full scan range Z run-out

< 2 nm


COGNEX Pattern Recognition

pattern align resolution of 1/4 pixel

 

Scanner Performances

XY Scanner Range

100 µm × 100 µm


XY Scanner Resolution

0.095 nm (20 bit position control)


Z Scanner Range

15 µm

Z Scanner Resolution

0.01 nm

 

AFM and XY Stage
Control Electronics

ADC

18 channels
4 high-speed ADC channels (64 MSPS)
24-bit ADCs for X,Y and Z scanner position sensor


Maximun Scan Size

4096 x 4096 pixels

DAC

12 channels
2 high-speed DAC channels (64 MSPS)
20-bit DACs for X,Y and Z scanner positioning

 

Vibration, Acoustic Noise, and ESD Performances

Floor Vibration

< 0.5 µm/s (10 Hz to 200 Hz w/ Active Vibration Isolation System)

Acoustic Noise

>20 dB attenuation w/ Acoustic Enclosure

 

Facility Requirements

Room Temperature (Stand By)

10 °C ~ 40 °C


Room Temperature (Operating)

18 °C ~ 24 °C


Humidity

30% to 60% (not condensing)


Floor Vibration Level

VC-E (3 µm/sec)


Acoustic Noise

Below 65 dB

Pneumatics

Vacuum : -60 kPa


Power Supply Rating

100/120 V/ 208~240 V, single phase, 15 A (max)


Total Power Consumption

2 KW (typical)


Ground Resistance

Below 100 ohms

 

Dimensions in mm
& Weight in kg

Acoustic Enclosure

880 (w) × 980 (d) × 1460 (h)
620 kg approx. (incl. basic NX-HDM System)


Control Cabinet

600 (w) × 900 (d) × 1600 (h)
170 kg approx. (incl. controllers)

System Floor Space

1720 (w) × 920 (d)


Ceiling Height

2000 or more


Operator Working Space

2400 (w) × 2450 (d), minimum (dimension unit: mm)

demensions[ Park NX-HDM system dimension ] / [ Park NX-HDM installation layout ]
 
 

Park XE-HDM Specifications

System
Specification

Motorized XY stage

travels up to 150 mm × 150 mm, 1 µm repeatability


Motorized Z stage

~30 mm Z travel distance
~0.08 µm resolution, < 1 µm repeatability

Motorized Focus Stage

11 mm Z travel distance for on-axis optics

Sample Thickness Allowance

up to 20 mm

Full scan range Z run-out

< 2 nm,repeatability < 1 nm

COGNEX Pattern Recognition

pattern align resolution of 1/4 pixel

 

Scanner Performances

XY Scanner Range

100 µm × 100 µm (high voltage mode)
10 µm × 10 µm (low voltage mode)

Z Scanner Range

12 μm (high voltage mode)
1.7 μm (low voltage mode)

XY Scanner Resolution

1.5 nm (high voltage mode)
<0.2 nm (low voltage mode)

Z Scanner Resolution

< 0.2 nm

 

AFM and XY Stage
Control Electronics

Controller Processing Unit

600 MHz and 4800 MIPS

Signal ADC & DAC

16-bit, 500 kHz bandwidth, internal lock-in

 

Vibration, Acoustic Noise, and ESD Performances

Floor Vibration

< 0.5 µm/s (10 Hz to 200 Hz w/ Active Vibration Isolation System)

Acoustic Noise

>20 dB attenuation w/ Acoustic Enclosure

 

Facility Requirements

Room Temperature (Stand By)

10 °C ~ 40 °C


Room Temperature (Operating)

18 °C ~ 24 °C

Humidity

30% to 60% (not condensing)


Floor Vibration Level

VC-E (3 μm/sec)

Acoustic Noise

Below 65 dB

Pneumatics

Vacuum: -60 kPa

Power Supply Rating

100/120 V/ 208~240 V, single phase, 15 A (max)

Total Power Consumption

2 KW (typical)

Ground Resistance

Below 100 ohms

 

Dimensions in mm
& Weight in kg

Acoustic Enclosure

820 (w) × 920 (d) × 1460 (h)
600 kg approx. (incl. basic NX-HDM System)


Operator Working Space

2400 (w) × 2450 (d), minimum (dimension unit: mm)

Control Cabinet

800 (w) × 800 (d) × 1030 (h)
160 kg approx. (incl. controllers)


System Floor Space

1720 (w) × 920 (d)


Ceiling Height

2000 or more

footprint[ Park XE-HDM installation layout ]
 

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