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  • Park
    3DM Series
    AFM Applications
 

An innovative 3D metrology solution

Undercut and Overhang Profiling

The NX-3DM allows unique access to the undercut and overhang structures of photoresist and other industrial materials, ensuring users receive accurate topographical data throughout the entire sample.

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undercut-and-overhang-profiling Images taken at three different tilting angles can be stitched to combined together automatically to form a complete 3D image

Critical Dimension Measurement

True Non-contact mode enables instrument and subject-preserving CD measurement without sacrificing image fidelity.

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critical-dimension-measurement-1 Photoresist dense lines pattern is imaged with 3D AFM, the profile matches with SEM image very well.
critical-dimension-measurement-2

Sidewall Roughness Measurement

The NX-3DM’s innovative head tilting design allows access to the sidewalls using an ultra sharp tip to obtain high resolution, well-defined details of the area and its roughness. Innovative head tilting design allows access to the sidewalls using ultra sharp tip to obtain high resolution and(more defined)details of the side wall roughness.

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sidewall-roughness-measurement 3D AFM image provide high resolution profiles for bottom, sidewall, and top of the photoresist line, which can be used for LER/sidewall roughness analysis of the structure
 
 
 

Park 3DM features

Innovative Z-Scan System

The many unique features of the NX-3DM are made possible by independently tilting the Z-scanner in its patented Crosstalk Eliminated platform, where XY and Z scanners are completely decoupled. This design allows users to access the vertical sidewalls as well as theundercut structures at various angles. Unlike in systems with flared tips, here high resolution and high aspect ratio probes can be used.

 

innovative-z-scan-system

 

Flexure-Guided XY Scanner with Closed-loop Dual Servo System

The 100 μm x 100 μm XY scanner consists of a symmetrical 2-dimensional flexure stage and high-force piezoelectric stacks that provide highly orthogonal movement with minimal out-of-plane motion, as well as the high responsiveness essential for precise sample scanning at the nanometer scale. Two symmetric, low-noise sensors are present on each axis of the XY scanner to retain a high level of orthogonality in the context of large scanning ranges and sample sizes. The secondary sensor corrects and compensates for non-linear and non-planar positional errors which might occur using a single sensor alone.


Automatic Measurement Control for Increased Efficiency

The NX-3DM is equipped with automated software that makes operation seamless. Just select the desired measurement program to get precise multi-site analysis and auto-optimized settings for cantilever tuning, scan rate, gain, and set-point parameters. Park's user-friendly software interface gives you the flexibility to create customized operation routines so you can make the most of the NX-3DM with the least amount of effort. Creating new routines is easy. On average it takes only 10 minutes to make a new routine, and less than 5 to modify an existing one.

automatic-measurement-control

Industry Leading Low Noise Z Detector

Our AFMs are equipped with the most effective low noise Z detectors in the field, with a noise of 0.2 Å over large bandwidth. This produces highly accurate sample topography, no edge overshoot and no need for calibration. Just one of the many ways Park NX-3DM saves you time and gives you better data.

 

Accurate Sample Topography Measured by Low Noise Z Detector

low-noise-Z-detector

 

No artifact by AFM scanner in low noise closed-loop topography

low-noise-closed-loop-topography

 

• Uses low noise Z detector signal for topography
• Has low Z detector noise of 0.02 nm over large bandwidth
• Has no edge overshoot at the leading and trailing edges
• Needs calibration done only once at the factory

 


Industry’s Lowest Noise Floor

To detect the smallest sample features, and image the flattest surfaces, Park has engineered the industry’s lowest noise floor specification of < 0.5 Å. The noise floor data is determined using a “zero scan.” The system noise is measured with the cantilever in contact with the sample surface at a single point under the following conditions:

• 0 nm x 0 nm scan, staying at one point.
• 0.5 gain in contact mode
• 256 x 256 pixels

lowest-noise-floor

gauge-repeatability-and-reproducibility

Gauge Repeatability and Reproducibility

Due to the ever-decreasing size of components, manufacturers now require the highest level of quality control. Park AFM can provide 1 gauge sigma of less than 1 angstrom.


Tool-to-tool Correlation

Thanks to Park's revolutionary AFM platform designed for industrial metrology, Park NX-3DM will correlate with any existing Park AFMs that have been previously used for manufacturing, inspection, analysis, or research.

tool-to-tool-correlation
 

Park 3DM Series - Applications | Park Atomic Force Microscope