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Mechanical Properties

Park Systems offers a set of mechanical scanning modes that easily measure the mechanical properties of a sample. Each mode features Park AFM’s trademark accuracy that allows users to collect reliable data.

Force Modulation Microscopy (FMM)

Park AFM’s FMM mode measures mechanical property variations over a sample’s surface. An AC modulation is applied to the cantilever while in contact with the sample surface, allowing you to monitor changes in amplitude and phase and gain insights into qualitative elastic and viscous responses.

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Force-Modulation-Microscopy

Specifications :

Adjustable modulation frequency: 1 kHz - 600 kHz
Frequency resolution: 0.02 Hz
Amplitude detection: < 0.1 nm
Phase resolution: 0.005°

Nanoindentation

Park AFM’s Nanoindentation mode uses excessive force on the cantilever to indent the sample and measure its mechanical properties including hardness and elasticity.

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Specifications :

Batch measurement on user specified points or grid
Indenting travel range: 12 µm
Displacement resolution: 0.1nm
Load Application: Piezoelectric Actuator
Maximum Load: 100 nN ~ 100 µN
Load Resolution: 100 nN

Nanolithography

Park AFM’s Nanolithography mode allows users to manipulate and create patterning on the sample surface through applied force or voltage. Tip position for lithography can be easily controlled by importing customized vector drawings or raster (bitmap) images.

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Nanolithography

Specifications :

Lithography method: vector and/or raster scan
Bias range: ±10V
Bias noise: 20 μV
High Voltage Toolkit required for voltages over ±10V

Park Scanning Probe Microscopy Modes