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XY scanners

Park XY scanners offer a wide range of features that make them extremely accurate and easy to use:

Higher linearity for more accurate scans

Many factors can compromise scanner accuracy like creep, hysteresis, temperature dependence and ageing. That’s why all of our XY scanners are controlled by a closed-loop circuit, which detects the real position of the scanner and corrects the nonlinear behavior, giving an integral linearity of  less than 0.5 %

Separate XY and Z scanners with no background curvature to control out-of-plane motion

Park AFMs feature separated  XY and Z-scanner structure, with no background curvature to reduce out of plane motion to less than 2 nm per 100 μm of movement.

Better responsiveness so you can see more

Our  XY scanners all have independent driving axes for each direction giving better responsiveness than piezoelectric tube scanners so you can see every detail.

 

10 μm x 10 μm XY Scanner for XE7

For the highest resolution AFM/STM imaging, choose the Park 10 µm XY-scanner. This XY-scanner is only compatible with the XE7.

xe7-10nm-XY-Scanner

Specifications :

Scan range: 10 µm
Resonant frequency: > 850 kHz
Resolution: 0.01 nm (open-loop)
 

10 μm x 10 μm XY Scanner for NX10

For the highest resolution AFM/STM imaging, choose the Park 10 µm XY-scanner. This XY-scanner is only compatible with the NX10.

nx10-XY-Scanner

Specifications :

Scan range: 10 µm
Resonant frequency: > 850 kHz
Resolution: 0.01 nm (open-loop)
 

50 μm x 50 μm XY Scanner

The standard scanner for XE7, the 50 µm XY-scanner offers high precision scanning and stable imaging condition with no background curvature giving you more accurate data.

50nm-XY-Scanner

Specifications :

Scan range: 50 µm, (5 µm in low-voltage mode)
Resonant frequency: > 850 kHz
Out-of-plane motion: < 1 nm
Resolution: 0.6 nm (closed-loop), 0.02 nm (open-loop)
 

100 μm x 100 μm XY Scanner

The 100 µm XY-scanner provides a larger, but still extremely precise, measurable area. This makes it perfect for semiconductor and materials research. Its high precision, linearity, and orthogonal scanning performance satisfies even the highest standard of industrial metrology.

100nm-XY-Scanner

Specifications :

Scan range: 100 µm, (10 µm in low-voltage mode)
Resonant frequency: > 450 kHz
Out-of-plane motion: < 2 nm
Resolution: 1.5 nm (closed-loop), 0.04 nm (open-loop)
 

100 μm x 100 μm XY Scanner for XE-150

Our 100 μm XY-scanner provides the wide scan range needed for materials and semiconductor research while still maintaining extremely low out-of-plane motion and high precision movement, linearity, and orthogonality.

Specifications :

Scan range: 100 µm
Resonant frequency: > 450 kHz
Out-of-plane motion: < 2 nm
Resolution: 1.5 nm (closed-loop), 0.04 nm (open-loop)
 

100 μm x 100 μm XY Scanner for NX-Bio

This 100 um XY-scanner provides gives the NX-BIO a very wide observable range for biological samples. Its innovative design also allows users convenient optical access to an inverted optical microscope for transparent samples.

Specifications :

Scan range: 100 µm
Resonant frequency: > 450 kHz
Out-of-plane motion: < 2 nm
Resolution: 1.5 nm (closed-loop), 0.04 nm (open-loop)
 

XY scanners