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Sample Mounts

The sample mount allows you to place various types of sample for the AFM measurement. It provides easier means to fix and access the sample.

 

Multi Sample Chuck

  • Sample plate to load multiple small samples for automated sequential scanning
  • Up to 16 samples of less than 10 mm × 10 mm, 20 mm thickness each
  • Sample weight: less than 200 g (in total)
 

150-mm Vacuum Sample Chuck

  • Sample size: 2, 4, 6 inch wafers, and up to 10 × 10 mm of arbitrary shape, 20 mm thickness
  • Sample weight: less than 500 g
 

Tilting Sample Chuck

tilting-sample-chuck

  • Sample plate to tilt the sample for sidewall measurements
    - Tilting angle: 10, 15, and 20°
    - Sample size: 20 mm × 20 mm, 2 mm thickness
    - Sample weight: less than 200 g
 

Non-magnetic Sample Holder

  • A sample holder to hold samples on top of the XY scanner using clips
  • Recommended for magnetically sensitive samples and / or configuration
 

Snap-In Sample Holder

  • Sample holder to place samples on a repeatable position
  • Positioning repeatability: 5 µm in X and Y direction each
 

Cross-sectional Sample Holder

  • Sample holder to vertically mount a cross-sectioned sample held by a metallic clip
  • Allowable sample thickness: 3 mm max.
 

Sample Mounts