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The Fully Automated AFM for Accurate Inline Metrology of Hard Disk Head Sliders that makes doing great work simpler.

Park Systems' PTR Series is a fully automatic industrial in-line AFM solution for, but not limited to, automatic Pole Tip Recession measurements on Rowbar-level, individual Slider-level, and HGA-level sliders. With sub-nano scale accuracy, repeatability, and throughput, the PTR Series is the metrology tool of choice for Slider manufacturers to improve their overall production yield.

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Inline Automation, for Fast, Accurate, and Repeatable PTR Measurements

The hard disk drive slider manufacturing industry demands a tool that provides fast, streamlined Pole Tip Recession Measurements while still maintaining the highest standard of accuracy available. It demands a tool like the Park NX-PTR. The NX-PTR offers extremely accurate PTR measurements to process engineers with inline automation that increases throughput. This makes it the perfect solution for HDD slider manufacturers looking to maximize their quality and production yield.

High Throughput, with No Need for Multiple Reference Scans


Most AFMs require multiple scans to get accurate PTR measurements - First macroscale reference scans then high-resolution scans of smaller areas of interest. This multi-scan process takes time and limits throughput. Our crosstalk eliminated scan system allows for truly flat scans, effectively eliminating the multi-scan process. In addition, True Non-Contact Mode™ preserves tip sharpness for prolonged high resolution imaging and much longer tip life. This lets the Park NX-PTR generate accurate images of highly detailed regions of interest within larger macrostructures, without any need of reference scan to correct various scanner artifacts.

NX-PTR Brochures


XE-PTR Brochures

 
 

Productivity meets Accuracy

Automatic Tip Exchange

Park’s automatic tip exchange system lets you seamlessly continue automated measurement routines. It automatically calibrates cantilever location and optimizes measurement settings based on measurements of a reference pattern. Our novel magnetic approach to the tip exchange has a 99% success rate, so you can do better work with less oversight.

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Automatic Laser Beam Alignment

Park’s automatic laser beam alignment let’s the user seamlessly continue automated measurement routines without user input. With our advanced pre-aligned cantilever holder, the laser beam is focused on the cantilever upon automatic tip exchange. The laser spot is then optimized along the X- and Y-axis by motorized positioning knobs.

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Customize your AFM to make it more efficient and more effective

Customized Sample Fixture

Park Systems can prepare customized sample fixtures to support customers’ specific samples, row bars or individual sliders. The customized sample fixture can provide a better connection between the measuring sample and the NX-PTR for increased accuracy.

 

customized-sample-fixture

Customized HGA Fixture

HGA fixtures can be custom built to firmly fit a specific HGA design provided by the customer, offering a more stable fixture. The non-damaging fixture allows users to easily load and unload the entire HGA, without causing any damage to the HGA. HGA then can be dismounted, and further tested. Up to 5 HGA samples of the same type can be mounted at the same time.

Customized-HGA-Fixture

Ionization System for a more stable scanning environment

Our innovative ionization system quickly and effectively removes electrostatic charges in your sample's environment. Since the system always generates and maintains the ideal balance of positive and negative ions, it can create an extremely stable charge environment with little contamination of the surrounding area and minimal risk of accidental electrostatic charge during sample handling.

NX-HDM Ionization-System
 
 

Automated Inline Measurements of Hard Disk Sliders

The key to improving the production yield of hard disk sliders with shrinking dimensions and increasing complexity is accuracy at the nanoscale.
Park NX-PTR provides accurate, automatic measurements for hard disk sliders.

Automatic PTR Measurement and Analysis

Pole Tip Recession measurements are fully automated with the NX-PTR system, giving you higher throughput capability, both at the carrier, rowbar, and slider level. 
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nx-ptr full automation

Park Systems’ industrial AFM provides accurate and reliable Pole Tip Recession (PTR) measurements in full automation.

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Proper monitoring of the PTR value requires a measurement accuracy of 0.1 nm, referenced against a surface which is 20µm away.


Automatic Wall Angle Measurement & Analysis

Automatically get measurement and analysis of the various wall angle applications.

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Automatic Defect Measurement and Analysis

edge-apike-defect-measurement -Analysis

Measurement and analysis of various defects such as edge spikes are fully automated.

 

Park NX-PTR features

Low Noise XYZ Position Sensors for more accurate scans

The NX-PTR provides you with unprecedented accuracy in topography height measurement by utilizing its ultra-low noise Z detector instead of the commonly used Z voltage signal that is non-linear in nature. Industry leading low noise Z detector replace the applied Z voltage as the topography signal and make the forward and backward scan gap a negligible 0.15% of the scan range.


Minimal Thermal Drift and Hysteresis reduces tip drift

The body of the NX-PTR is designed to be extremely mechanically and thermally stable, minimizing thermal drift and giving you more precise measurements. A typical thermal drift rate is less than 100 nm/°C for the lateral direction and 200 nm/°C for the vertical direction.


Automatic Measurement Control so you can get accurate scans with less work

aotomatic-softwareThe NX-PTR is equipped with automated software that makes operation nearly effortless. Just select the desired measurement program to get precise multi-site analysis with optimized setting for cantilever tuning, scan rate, gain, and set point parameters. Park's user-friendly software interface gives you the flexibility to create customized operation routines so you can access the full power of the NX-PTR and get the measurements you need. Creating new routines is easy. It takes about 10 minutes to create a new routine from scratch, or less than 5 minutes to modify an existing one.


Park NX-PTR’s automated system features

• Auto, semi-auto, and manual mode so you have complete control
• Editable measurement method for each automated routine
• Live monitoring of the measurement process
• Automatic analysis of acquired measurement data

 
  • NX-PTR
  • XE-PTR
 

Park NX-PTR Specifications

System
Specification

Motorized XY stage

travels up to 200 mm × 200 mm, 2 µm repeatability


Motorized Z stage

25 mm Z travel distance
0.1 µm resolution, < 1 µm repeatability


Motorized Focus Stage

15 mm Z travel distance for on-axis optics

Tilting stage

tilt angle: ±1.8°
resolution: 3.28㎚ for 50㎛


Sample Thickness Allowance

up to 20 mm


Full scan range Z run-out

< 2 nm


COGNEX Pattern Recognition

pattern align resolution of 1/4 pixel

 

Scanner Performances

XY Scanner Range

100 µm × 100 µm


XY Scanner Resolution

0.095 nm (20 bit position control)

Z Scanner Range

15 µm

Z Scanner Resolution

0.01 nm

 

AFM and XY Stage
Control Electronics

ADC

18 channels
4 high-speed ADC channels
24-bit ADCs for X,Y and Z scanner position sensor


Maximun Scan Size

4096 x 4096 pixels

DAC

12 channels
2 high-speed DAC channels
20-bit DACs for X,Y and Z scanner positioning

 

Vibration, Acoustic Noise, and ESD Performances

Floor Vibration

< 0.5 µm/s (10 Hz to 200 Hz w/ Active Vibration Isolation System)

Acoustic Noise

>20 dB attenuation w/ Acoustic Enclosure

 

Facility Requirements

Room Temperature (Stand By)

10 °C ~ 40 °C


Room Temperature (Operating)

18 °C ~ 24 °C


Humidity

30% to 60% (not condensing)


Floor Vibration Level

VC-E (3 µm/sec)


Acoustic Noise

Below 65 dB

Pneumatics

Vacuum : -60 kPa


Power Supply Rating

100/120 V/ 208~240 V, single phase, 15 A (max)


Total Power Consumption

2 KW (typical)


Ground Resistance

Below 100 ohms

 

Dimensions in mm
& Weight in kg

Acoustic Enclosure

880 (w) × 980 (d) × 1460 (h)
620 kg approx. (incl. basic NX-HDM System)


Control Cabinet

600 (w) × 900 (d) × 1600 (h)
170 kg approx. (incl. controllers)

System Floor Space

1720 (w) × 920 (d)


Ceiling Height

2000 or more


Operator Working Space

2400 (w) × 2450 (d), minimum (dimension unit: mm)

demensions[ Park NX-PTR system dimension ] / [ Park NX-PTR installation layout ]
 
 

Park XE-PTR Specifications

SPECIFICATIONS

System Specification

Motorized XY stage : travels up to 275 mm × 150 mm, 0.5 μm resolution
Motorized Z stage : ~30 mm Z travel distance, ~0.08 μm resolution, < 1 μm repeatability
Motorized Focus Stage : 11 mm Z travel distance for on-axis optics
Sample Thickness Allowance : up to 20 mm Full scan range
Z run-out : < 2 nm, repeatability < 1 nm
COGNEX Pattern Recognition : pattern align resolution of 1/4 pixel

 

Scanner Performances

XY Scanner Range : 100 μm × 100 μm (high voltage mode), 10 μm × 10 μm (low voltage mode)
XY Scanner Resolution : 1.5 nm (high voltage mode), < 0.2 nm (low voltage mode)
Z Scanner Range : 12 μm (high voltage mode), 1.7 μm (low voltage mode)
Z Scanner Resolution : < 0.2 nm

 

AFM and XY Stage

Control Electronics Controller Processing Unit : 600 MHz and 4800 MIPS
Signal ADC & DAC : 16-bit, 500 kHz bandwidth, internal lock-in

 

Compliances

CE
SEMI Standard S2-0703
SEMI Standard S8-1103

 

Vibration, Acoustic Noise, and ESD Performances

Floor Vibration : < 0.5 μm/s (10 Hz to 200 Hz w/ Active Vibration Isolation System)
Acoustic Noise : >20 dB attenuation w/ Acoustic Enclosure

 

Operation and Maintenance

Throughput : >10 samples/hr (parameter dependent)
Cantilever Life : >400 images w/ NCHR cantilevers (parameter dependent)

 

Facility Requirements

Room Temperature (Stand By) : 10 °C ~ 40 °C Room
Temperature (Operating) : 18 °C ~ 24 °C
Humidity : 30% to 60% (not condensing)
Floor Vibration Level : VC-E (3 μm/sec)
Acoustic Noise : Below 65 dB
Pneumatics : Vacuum : -60 kPa
Supply Rating : 100/120 V/ 208~240 V, single phase, 15A (max)
Total Power Consumption : 2 kW (typical)
Ground Resistance : Below 100 ohms

 

Dimension & Weight

System : 880(w) × 980(d) × 1460(h), 690 kg approx. (incl. XE-PTR system)
Control Cabinet : 800(w) × 800(d) × 1000(h), 160 kg approx. (incl. controllers)
System Floor Space : 1780(w) × 980(d)
Ceiling Height : 2000 or more
Operator Working Space : 2400(w) × 2450(d) minimum (dimension unit: mm)

footprint[ Park XE-PTR installation layout ]
 

Software & User Interface

XEA - Industrial Automation & Analysis

XEA is a system software for automation that carries out the AFM measurement of a sample following the preset procedure written in a recipe file. User-friendly XEA architecture provides flexibility to operator to perform various system-wide functions.
 
• Supports auto, semi-auto, and manual mode
• Editable measurement method for each automated procedure
• Live monitoring of the measurement process
• Automatic analysis of acquired measurement data

 

XEP – Data Acquisition

All the user controls on AFM measurements are operated through XEP, the data acquisition program. The user-oriented interface provides easy operation of AFM.
 
• Simultaneous data acquisition of up to 16 images
• Maximum 4096 × 4096 image size
• Dedicated Force-distance and I-V spectroscopy with batch processing
• Cantilever spring constant calibration
• Script-level control through external program (LabVIEW, C++)

 

XEI – Image Processing and Analysis

XEI is the AFM image processing and analysis program. The powerful processing algorithms make the analysis easy and streamlined. With its most advanced and versatile imaging features, XE users can obtain essential and critical information from their experiment.
 
• Image analysis of line profile, region, 3D rendering
• Spectroscopy data analysis module (F-d, I-V)
• Directly copy/paste to presentation program
• Multiple image comparison
• Image overlay of two different images

 

Options

Customized Sample Fixture

Park Systems can prepare customized sample fixtures to support customers’ specific samples, row bars or individual sliders. The customized sample fixture guarantees a superior connection between the measuring sample and the XE-PTR.

 

Automatic Tip Exchange (ATX)

Automatic Tip Exchange performs fully automated tip exchanges in order to seamlessly continue automated measurement routines. It automatically calibrates cantilever location and optimizes measurement settings based on measurements of a reference pattern. Our novel magnetic approach to the tip exchange yields a 99% success rate, higher than the traditional vacuum techniques.

 

Non-damaging Customized HGA Fixture

HGA fixture can be custom built to firmly fit a specific HGA design provided by the customer, providing the most stable fixture in the industry. The non-damaging fixture allows users to easily load and unload the entire HGA, without causing any damage to the HGA. HGA then can be dismounted, and further tested. Up to 5 HGA samples of the same type can be mounted at the same time.

 

Ionization System

Ionization system effectively removes electrostatic charges. It ionizes the charged objects and is very reliable since the system always generates and maintains an ideal balance of positive and negative ions without causing any contamination to the surrounding area. It also reduces the accidental electrostatic built-in charge that may occur during sample handling.

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