|Contact Us  Global
  • NX-HDM
  • XE-HDM
 

Park NX-HDM Specifications

System
Specification

Motorized XY stage

travels up to 150 mm × 150 mm, 2 µm repeatability


Motorized Z stage

25 mm Z travel distance
0.1 µm resolution, < 1 µm repeatability


Motorized Focus Stage

15 mm Z travel distance for on-axis optics

Sample Thickness Allowance

up to 20 mm


Full scan range Z run-out

< 2 nm


COGNEX Pattern Recognition

pattern align resolution of 1/4 pixel

 

Scanner Performances

XY Scanner Range

100 µm × 100 µm


XY Scanner Resolution

0.095 nm (20 bit position control)


Z Scanner Range

15 µm

Z Scanner Resolution

0.01 nm

 

AFM and XY Stage
Control Electronics

ADC

18 channels
4 high-speed ADC channels
24-bit ADCs for X,Y and Z scanner position sensor


Maximun Scan Size

4096 x 4096 pixels

DAC

12 channels
2 high-speed DAC channels
20-bit DACs for X,Y and Z scanner positioning

 

Vibration, Acoustic Noise, and ESD Performances

Floor Vibration

< 0.5 µm/s (10 Hz to 200 Hz w/ Active Vibration Isolation System)

Acoustic Noise

>20 dB attenuation w/ Acoustic Enclosure

 

Facility Requirements

Room Temperature (Stand By)

10 °C ~ 40 °C


Room Temperature (Operating)

18 °C ~ 24 °C


Humidity

30% to 60% (not condensing)


Floor Vibration Level

VC-E (3 µm/sec)


Acoustic Noise

Below 65 dB

Pneumatics

Vacuum : -60 kPa


Power Supply Rating

100/120 V/ 208~240 V, single phase, 15 A (max)


Total Power Consumption

2 KW (typical)


Ground Resistance

Below 100 ohms

 

Dimensions in mm
& Weight in kg

Acoustic Enclosure

880 (w) × 980 (d) × 1460 (h)
620 kg approx. (incl. basic NX-HDM System)


Control Cabinet

600 (w) × 900 (d) × 1600 (h)
170 kg approx. (incl. controllers)

System Floor Space

1720 (w) × 920 (d)


Ceiling Height

2000 or more


Operator Working Space

2400 (w) × 2450 (d), minimum (dimension unit: mm)

demensions[ Park NX-HDM system dimension ] / [ Park NX-HDM installation layout ]
 
 

Park XE-HDM Specifications

System
Specification

Motorized XY stage

travels up to 150 mm × 150 mm, 1 µm repeatability


Motorized Z stage

~30 mm Z travel distance
~0.08 µm resolution, < 1 µm repeatability

Motorized Focus Stage

11 mm Z travel distance for on-axis optics

Sample Thickness Allowance

up to 20 mm

Full scan range Z run-out

< 2 nm,repeatability < 1 nm

COGNEX Pattern Recognition

pattern align resolution of 1/4 pixel

 

Scanner Performances

XY Scanner Range

100 µm × 100 µm (high voltage mode)
10 µm × 10 µm (low voltage mode)

Z Scanner Range

12 μm (high voltage mode)
1.7 μm (low voltage mode)

XY Scanner Resolution

1.5 nm (high voltage mode)
<0.2 nm (low voltage mode)

Z Scanner Resolution

< 0.2 nm

 

AFM and XY Stage
Control Electronics

Controller Processing Unit

600 MHz and 4800 MIPS

Signal ADC & DAC

16-bit, 500 kHz bandwidth, internal lock-in

 

Vibration, Acoustic Noise, and ESD Performances

Floor Vibration

< 0.5 µm/s (10 Hz to 200 Hz w/ Active Vibration Isolation System)

Acoustic Noise

>20 dB attenuation w/ Acoustic Enclosure

 

Facility Requirements

Room Temperature (Stand By)

10 °C ~ 40 °C


Room Temperature (Operating)

18 °C ~ 24 °C

Humidity

30% to 60% (not condensing)


Floor Vibration Level

VC-E (3 μm/sec)

Acoustic Noise

Below 65 dB

Pneumatics

Vacuum: -60 kPa

Power Supply Rating

100/120 V/ 208~240 V, single phase, 15 A (max)

Total Power Consumption

2 KW (typical)

Ground Resistance

Below 100 ohms

 

Dimensions in mm
& Weight in kg

Acoustic Enclosure

820 (w) × 920 (d) × 1460 (h)
600 kg approx. (incl. basic NX-HDM System)


Operator Working Space

2400 (w) × 2450 (d), minimum (dimension unit: mm)

Control Cabinet

800 (w) × 800 (d) × 1030 (h)
160 kg approx. (incl. controllers)


System Floor Space

1720 (w) × 920 (d)


Ceiling Height

2000 or more

footprint[ Park XE-HDM installation layout ]
 
 

Automatic Measurement Control

Automated software makes the NX-HDM operation effortless. Measurement recipes provide multi-site analysis with optimized settings for cantilever tuning, scan rate, gain, and set point parameters. The system software for automation executes the sample measurement by following a preset procedure written in a recipe file. Park's user-friendly software interface provides operator with a flexibility to perform various system-wide functions. It takes about 10 minutes to create a new recipe from scratch, or less than 5 minutes to modify an existing recipe.

Park NX-HDM provides these:
• Auto, semi-auto, and manual mode
• Editable measurement method for each automated procedure
• Live monitoring of the measurement process
• Automatic analysis of acquired measurement data
Automatic-Measurement-Control

Ionization System

Ionization system effectively removes electrostatic charges. It ionizes the charged objects and is very reliable since the system always generates and maintains an ideal balance of positive and negative ions without causing any contamination to the surrounding area. It also reduces the accidental electrostatic built-in charge that may occur during sample handling.

NX-HDM Ionization-System
 
 

Automatic Defect Review for Media and Substrates

Higher Throughput, Automatic Defect Review

The Automatic Defect Review (Park ADR) in the NX-HDM speeds up and improves the way defects in substrates and media are identif ied, scanned, and analyzed. Using the defect location map provided from an optical inspection tool, Park ADR automatically goes to e ach of those locations, and images the defects in two steps:
(1) image a larger, survey scan to refine the defect location
(2) then image a smaller zoom-in scan to obtain the details of the defect. Test runs with real defects demonstrate a 10x increase in throughput for defect review in an automated process compared to conventional methods.

Automated Search Scan & Zoom-in Scan

Optimized scan parameters enable a fast two step scan:
(1) a quick, low resolution search scan to locate the defect
(2) a high resolution zoom-in scan to obtain defect details. The scan size and scan speed parameters are adjustable to match the user’s need.defect-review2

  Read More related application

Automatic Transfer and Alignment of Defect Maps to AFM

Utilizing an advanced proprietary mapping algorithm, the defect map obtained from automated optical inspection (AOI) tool is accurately transferred and mapped onto Park NX-HDM. This technology allows full automation for high throughput defect imaging.

Map of Defect Coordinates from an Optical Inspection Tooldefect-maps
 

Accurate Sub-Angstrom Surface Roughness Measurement

Sub-Angstrom, Surface Roughness Measurement

Increasingly, industries require ultra-flat media and substrate to address the ever-shrinking device dimensions. Park NX-HDM provides accurate sub-angstrom surface roughness measurements, scan after scan. Park NX-HDM, together with its industry’s lowest noise floor, and its unique True Non-Contact™ technology, it is the most accurate AFM for surface roughness measurement in the market.

tip long term 1tip long term 2

 

Accurate AFM Scan by True Non-Contact™ Mode

True Non-Contact™ Mode

non-contact
  • Less tip wear = Prolonged high-resolution scan
  • Non-destructive tip-sample interaction = Minimized sample modification
  • Immunity from parameter dependent results
non-contact-mode

Tapping Imaging

tapping-imaging
  • Quick tip wear = Blurred low-resolution scan
  • Destructive tip-sample interaction = Sample damage and modification
  • Highly parameter-dependent
tapping-imaging
 

Accurate AFM Topography with Low Noise Z Detector

True Sample Topography™ without piezo creep error

  • Low noise Z detector signal is used for Topography
  • Low Z detector noise of 0.02 nm over large bandwidth
  • No edge overshoot at the leading and trailing edges
  • Calibration needs to be done only once at the factory

Park NX AFM

no-creep-effect

Conventional AFM

creep-effect
 

Park NX-HDM features

Fully Automated Pattern Recognition
zsta2

Utilizing a powerful combination of high resolution digital CCD camera and pattern recognition software, a fully automated pattern recognition and alignment is made possible for user applications.

Automatic Measurement Control
automatic-measurement-control-hdm

The NX-HDM is equipped with automated software that makes operation nearly effortless. Just select the desired measurement program to get precise multi-site analysis with optimized setting for cantilever tuning, scan rate, gain, and set point parameters as a recipe.

Park's user-friendly software interface gives you the flexibility to create customized operation routines (recipes) so you can access the full power of the NX-HDM and get the measurements you need.

Creating new recipes is easy. It takes about 10 minutes to create a new routine from scratch, or less than 5 minutes to modify an existing one.

Park NX-HDM provides these:
• Auto, semi-auto, and manual mode so you have complete contro
• Editable measurement method for each automated routine
• Live monitoring of the measurement process
• Automatic analysis of acquired measurement data

2D Flexure-Guided Scanner with 100 µm x 100 µm Scan Range

2D-Flexure-Guided-Scanner
The XY scanner consists of symmetrical 2-dimensional flexure and high-force piezoelectric stacks that provide high orthogonal movement with minimal out-of-plane motion as well as the high responsiveness essential for precise sample scanning in the nanometer scale.

Closed-loop XY Scan with Dual Servo System

dual-servo-afm-system
Two symmetric, low-noise position sensors are incorporated on each axis of the XY scanner to retain high scan orthogonality for the largest scan ranges and sample sizes. The secondary sensor corrects and compensates for non-linear and non-planar positional errors caused by a single sensor alone.

High Speed Z Scanner with 15 µm Scan Range

9 9 11Driven by a high-force piezoelectric stack and guided by a flexure structure, the standard Z scanner has a high resonant frequency of more than 9 kHz (typically 10.5 kHz) and Z-servo speed of more than 48 mm/sec tip velocity which enables accurate feedback. The maximum Z scan range can be extended from 15um to 40um with the optional long scan range Z scanner.

Low Noise XYZ Position Sensors

position-sensors The industry leading low noise Z detector replaces the applied Z voltage as the Topography signal. In addition, the low noise XY closed loop scan minimizes the forward and backward scan gap to be less than 0.15% of the scan range.

Industry’s Lowest Noise Floor
2 Low-Noise-Floor

To detect the smallest sample features and image the flattest surfaces, Park Systems has engineered instruments which hold the industry’s lowest noise floor specification of < 0.5Å. Noise floor data is determined using a “zero scan”. With the cantilever in contact with the sample surface, the system noise is measured at a single point under the following conditions:   

• 0 nm x 0 nm scan, staying in one point   
• 0.5 gain, in contact mode 
• 256 x 256 pixels

 

Simply the best AFM for automatic defect review and surface roughness measurement

The task of identifying nanoscale defects is a very time consuming process for engineers working with media and flat substrates. Park NX-HDM is an atomic force microscopy system that speeds up the defect review process by an order of magnitude through automated defect identification, scanning and analysis. Park NX-HDM links directly with a wide range of optical inspection tools, thus significantly increasing the automatic defect review throughput. In addition, Park NX-HDM provides accurate sub-angstrom surface roughness measurements, scan after scan. Park NX-HDM, together with its industry's lowest noise floor, and its unique True Non-Contact™ technology, it is the most accurate AFM for surface roughness measurement in the market.

Request for Quote
 

Higher Throughput, Automatic Defect Review

The task of identifying nanoscale defects is a very time consuming process for engineers working with media and flat substrates. Park NX-HDM is an atomic force microscopy system that speeds up the defect review process by an order of magnitude through automated defect identification, scanning and analysis. Park NX-HDM links directly with a wide range of optical inspection tools, thus significantly increasing the automatic defect review throughput.

 

Sub-Angstrom, Surface Roughness Measurement

Increasingly, industries require ultra-flat media and substrate to address the ever-shrinking device dimensions. Park NX-HDM provides accurate sub-angstrom surface roughness measurements, scan after scan. Park NX-HDM, together with its industry’s lowest noise floor, and its unique True Non-Contact™ technology, it is the most accurate AFM for surface roughness measurement in the market.

Park NX-HDM

Park NX-HDM

 

NX-HDM Brochures


XE-HDM Brochures

 

Park AFM Options