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Technical Articles

24, Dec 13'
Category: Nano Materials
True Sample Topography Acquired by Low-Noise Z Position Sensor True Sample Topography Acquired by Low-Noise Z Position Sensor Ahram Kim (Research ...
24, Dec 13'
Category: Solar Cell
Solar Cells Optical Property - Photoconductivity   Topography (left image) and photocurrent (right images) with laser sou...
24, Dec 13'
Category: MEMS structure
New 3-Dimensional AFM for CD Measurement and Sidewall Characterization Yueming Hua*, Cynthia Buenviaje-CogginsPark Systems Inc. 3040 Olcott St. ...
24, Dec 13'
Category: Nano Fabrication
High Aspect Ratio Structure High Aspect Ratio Structure – Deep Trench Nanometrology Figure 1 shows a 50nm wide silicon trench, with aspect ...
24, Dec 13'
Category: Semiconductor
New 3D-AFM for High Resolution Sidewall Imaging Limitations of Conventional 3D AFM   Flare Tip&nb...
24, Dec 13'
Category: Semiconductor
Critical Dimension Measurement of High Aspect Ratio Trench with Park AFM AFM and the Semiconductor Industry Atomic Force Microscopy (AFM) is em...
24, Dec 13'
Category: Semiconductor
Etched Silicon Structures Metrology – Non-Contact Mode With the increasing shrinkage of device sizes, the characterization of thin films and ...
24, Dec 13'
Category: Semiconductor
Chemical Mechanical Polishing (CMP) Metrology with Advanced AFM Surface Profiler Chemical Mechanical Polishing Figure 1. The key matrices o...
24, Dec 13'
Category: Data Storage
Critical Roughness Metrology Figure 1. Non-Contact mode topography image of a stainless steel wafer measured using an XE-150.  Autom...
23, Dec 13'
Category: Materials
True Sample Topography Acquired by Low-Noise Z Position Sensor Ahram Kim (Research Product Management of Park Systems, Seoul, Korea)   Pi...

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