Park Systems Atomic Force Microscope, AFM/SPM

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Modes

XE Heads

LD/SLD
The XE heads use two types of laser beams to detect the cantilever deflection, either LD (Laser Diode) or SLD (Super Luminescence Diode). LD is used for most of AFM measurements, whose wavelength lies in visible ray range (650 nm). On the other hand, SLD has low coherent beam, so that it can prevent possible optical interference noise. The wavelength of SLD lies in infrared region (835 nm), which can also be used to avoid the visual ray region of other optical instruments.

Z-Scan Range
The design of the XE head, the separated Z-scanner from its XY-scanner, enables customers to select Z scan range independently from the XY scan range. A 12 μm Z-scanner is provided for general AFM measurements, and a 25 μm Z-scanner for scanning macroscopic structures.

Standard XE Head

The standard XE head is the basic head developed for all of the standard and the advanced modes for XE-series AFMs.

Specification

Z scan range: 12 μm
Resonant frequency of Z-scanner: 5 kHz
Laser type: LD (630 nm) or SLD (830 nm)
Noise floor: 0.02 nm (typical), 0.05 nm (maximum)

25um XE Head

Extended scanning range of the 25 μm Z-scanner enables the measurement of high aspect ratio samples such as optical lenses and MEMS device. The head is fully compatible with all the existing modes and options.

Specification

Z scan range: 25 μm
Resonant frequency: 1.7kHz
Laser type: LD (630 nm) or SLD (830 nm)
Noise floor: 0.03 nm (typical), 0.05 nm (maximum)

Optical Head

The cantilever of the AFM can be used as a medium of light amplification when it is combined with NSOM or Raman spectroscopy, which enhances the optical response of the sample. In order to deliver maximized optical beam to and from the cantilever, the XE Optical Head provides wide optical accessibility from top, bottom, and side. It is also compatible with all the options of XE-series AFM.

Specification

Optical accessibility: top, bottom, and side
Z scan range: 12 μm or 25 μm
Resonant frequency: 5 kHz(12 μm XE Head), 1.7 kHz (25 μm XE Head)
Laser type: LD (630 nm) or SLD (830 nm)
Noise floor: 0.03 nm (typical), 0.05 nm (maximum)

Hysitron Triboscope Adaptor Head

The adaptor head is designed to integrate Triboscope nanoindenter of Hysitron, Inc. with XE-series AFMs. The high feedback performance of the Z-scanner enables precise nanoindentation measurement.

Specification

Adaptor to combine with Triboscope nanoindenter of Hysitron, Inc.
Z scan range: 12 μm or 25 μm
Resonant frequency: 5 kHz (12 μm XE Head), 1.7 kHz (25 μm XE Head)
Vertical drift rate: < 1 nm/min

XY-Scanners

Scan Linearity
Scanners using piezoelectric materials show many nonlinear behaviors such as creep, hysteresis, temperature dependency of piezoelectrics as well as ageing phenomena. The movement of the XY-scanners is controlled in closed-loop circuit, which detects the real position of the scanner and corrects the nonlinear behavior. Integral nonlinearity of the XY-scanners is less than 0.5 %.

Out-of-Plane Curvature
In conventional piezoelectric tube based scanners, the lateral movement of the scanner is coupled with the vertical movement of the scanner. In the early stage of AFM scanners, the scanning range is quite small and can be corrected by logical algorithm. However, the piezoelectric tube based scanners introduced intrinsic background curvature to the AFM data. To overcome this principal limitation, Park Systems introduced separated XY and Zscanner structure, which has no background curvature. Furthermore, the high quality control of Park Systems enables the practical out-of-plane motion of the XY-scanners less than 2 nm over 100 µm movement.

Resonant Frequency
The response of the scanner to the driving signal is depends on its resonant frequency, XY-scanner has an independent driving axe for each direction which has superior responsiveness than the piezoelectric tube scanner has.

5 μm x 5 μm XY-Scanner

For high resolution AFM/STM imaging, Park Systems offers this XY-scanner. The 5 μm XY-scanner is only applicable to XE-70 and XE-100.

Scan range: 5 μm
Resonant frequency: > 850 Hz
Out-of-plane curvature: < 1 nm
Resolution: 0.01 nm (open-loop)
Allowable sample size: 80 mm × 80 mm, 20 mm thick

50 μm x 50 μm XY-Scanner

The 50 μm XY-scanner is the standard scanner for XE-70 and XE-100. High precision scanning of the 50 μm XY-scanner provides stable imaging condition with no background curvature.

Scan range: 50 μm, (5 μm in low-voltage mode)
Resonant frequency: > 850 Hz
Out-of-plane curvature: < 1 nm
Resolution: 0.6 nm (closed-loop), 0.02 nm (open-loop)

100 μm x 100 μm XY-scanner

The 100 μm XY-scanner is developed to provide larger, yet precise, measurable area, which is indispensable for semiconductor and materials research. High precision, linearity, and orthogonal scanning performance of the scanner satisfies even the high standard of industrial metrology.

Scan range: 100 μm, (10 μm in low-voltage mode)

Resonant frequency: > 450 Hz

Out-of-plane curvature: < 2 nm

Resolution: 1.5 nm (closed-loop), 0.04 nm (open-loop)

Allowable sample size:

     100 mm × 100 mm, 20 mm thick (XE-100)
     150 mm × 150 mm, 20 mm thick (XE-150)
     200 mm × 200 mm, 20 mm thick (XE-200)

100 μm x 100 μm XY-Scanner for XE-Bio

The 100 μm XY-scanner for XE-Bio provides wide observable range to meet the dimension of biological samples. Based on the stable performance of the flexure scanner of XE technology, the XE-Bio scanner is reorganized to combine with inverted optical microscope. The design of the scanner provides an user convenient optical access from top to bottom and vice versa, which is useful for optical measurement of transparent biological samples.

Scan range: 100 μm
Resonant frequency: > 450 Hz
Out-of-plane curvature: < 2 nm
Resolution: 1.5 nm (closed-loop), 0.04 nm (open-loop)
Allowable sample size: 50 mm × 50 mm, 10 mm thick

100 μm x 100 μm XY-Scanner for NSOM/Raman

The 100 μm XY-scanner for XE-NSOM/Raman is a large scale scanner with High precision, linearity, and orthogonal performance, which allows optical path through the scanner for advanced optical measurements including Near-field Scanning Optical Microscopy(NSOM), Raman Spectroscopy, and Confocal Microscopy as well.

Scan range: 100 μm
Resonant frequency: > 450 Hz
Out-of-plane curvature: < 2 nm
Resolution: 1.5 nm (closed-loop), 0.04 nm (open-loop)
Allowable sample size: 100 mm x 100 mm, 20 mm thick

200 μm x 200 μm XY-scanner for XE-200

The 200 μm XY-scanner allows wide scan range for materials and semiconductor research. Despite the huge range, the scanner shows very low out-of-plane motion as well as high precision movement, linearity, and orthogonality.

Scan range: 200 μm
Resonant frequency: > 350 Hz
Out-of-plane curvature: < 4 nm
Resolution: 3 nm (closed-loop), 0.1 nm (open-loop)
Allowable sample size: 200 mm × 200 mm, 20 mm thick

Probehands

Probehands, one of the core parts of the XE head, are connected to the Z-scanner and transfers the movement of the scanner to the cantilever which is attached to the end of the probehand. Depending on the configuration of the measurement setup, the probehand is chosen.

Standard Probehand

The standard probehand is designed to be used in general operation. It features fast and easy cantilever loading of pre-mounted cantilevers and the cantilever bias function without wiring. The guided mounting of pre-mounted cantilevers also enables users to align the laser easily on the cantilever. The probehand supports all the standard and advanced modes but STM, SCM, and liquid imaging.

Cantilever mounting: Guided kinematic mounting
Cantilever bias range: -10 V ~ 10 V

Clip-type Probehand

Unmounted cantilevers can be used with the clip-type probehand. The probehand also has cantilever bias function without wiring, and supports all the standard and advanced modes apart from STM, SCM, and liquid imaging.

Cantilever mounting: Clipping of unmounted cantilevers
Cantilever bias range: -10 V ~ 10 V

Liquid ProbehandⅠ(open)

The standard liquid probehand provides suitable environment in liquid imaging by reducing unnecessary immersion of mechanical parts other than cantilever. It can be used with open liquid cell.

Cantilever mounting: Guided kinematic mounting
Cantilever bias range: Not available

Liquid probehandⅡ(closed)

The liquid probehandⅡis designed to use in general liquid environment, especially in biological research. The probehand is resistant to most of buffer solution including acid, and can be used with the Universal liquid cell to accommodate closed-liquid cell environment, as well as with open liquid cell.

Cantilever mounting: Clipping of unmounted cantilevers
Cantilever bias range: Not available

SCM Probehand

Scanning capacitance microscopy(SCM) measures the doping concentration of semiconductor by means of the change in the capacitive coupling between the cantilever and the sample. SCM probehand is made with dielectrics to minimize parasitic capacitive coupling.

Cantilever mounting: Clipping of unmounted conducting cantilevers
Cantilever bias range: -10 V ~ 10 V
Designed to transfer RF signal to the cantilevers
Designed to minimize parasitic capacitance coupling

STM Probehand

A sharpened metal (Pt-Ir) tip instead of a cantilever is used for scanning tunneling microscopy (STM). The STM probehand is developed to hold the STM tip, and is shielded with ceramics to suppress possible electrical noise.

Tip mounting: Snapping of Pt-Ir wire
Tip bias range: -10 V ~ 10 V
Designed to minimize current noise

Liquid Cells

Most of biological samples are immersed in liquid, and measurements are made while controlling the temperature and concentration of a buffer solution as well as voltage applied to the solution. Park Systems provides various liquid cell options.

Universal Liquid cell

The universal liquid cell is developed to meet diverse environmental control options with a single unit. The cell can be used as an open liquid cell as well as a closed liquid cell, while controlling the temperature from 0 °C to 110 °C. The cell includes three pipettes to perfuse liquid or gas to/from the cell, and two electrodes utilized as the reference and the counter electrode in electrochemistry.

Applicable configuration: open liquid cell, closed liquid cell, open liquid cell with heating/cooling, closed liquid cell with heating/cooling, electrochemistry cell, electrochemistry cell with heating/cooling

Number of electrodes: 2 electrodes
Applicable bias voltage: - 10 V ~ 10 V
Capacity of liquid: 3 cm³
Temperature range: 0 °C ~ 110 °C (in air), 0 °C ~ 70 °C (with liquid)
Temperature resolution: 0.1 °C
Sample size: 20 mm in diameter / 5 mm in thickness
Compatible probehand: Shielded liquid probehand, Glass probe hand
Compatible XY-scanner: 50 μm XY-scanner, 100 μm XY-scanner

Electrochemistry cell

Material: PCTFE, resistant against corrosive solution
Number of electrodes: 4 electrodes
Applicable bias voltage: -10 V ~ 10 V
Capacity of liquid: 5 ㎤
Sample size: 10 mm or 45 mm in diameter / 2 mm thickness
Compatible probehand: Shielded liquid probehand
Compatible XY-scanner: 50 μm XY-scanner, 100 μm XY-scanner

Open liquid cell

Open liquid cell is a cell which is used to accomodate liquid environment. The cell is resistant against corrosive solutions, and has clips to hold samples.

Material: PCTFE, resistant against corrosive solution
Capacity of liquid: 2.3 ㎤
Sample size: 14 mm in diameter, or 20 mm × 35 mm / 4.5 mm thickness
Compatible probehand: Shielded liquid probehand, Glass probe hand
Compatible XY-scanner: 50 μm XY-scanner, 100 μm XY-scanner

Temperature Control

Most of the interesting phenomena of polymers and biological samples are observed by changing the sample temperature. Park Systems provides various temperature control options.

Temperature control stage I

Many polymers and ceramics show phase change as the temperature goes through the critical temperature. The phenomena can be observed by using AFM with heating/cooling stage option, which controls the temperature from 0 °C to 180 °C with 0.1 °C resolution.

Active Heating / Active Cooling
Temperature range: 0 °C ~ 180 °C
Temperature resolution: 0.1
Coolant circulation: Vibration-free water circulation
Sample size: 15 mm × 15 mm / 15 mm in thickness
Compatible XY-scanner: 50 μm XY-scanner, 100 μm XY-scanner

Temperature control stage II

Heating stage provides higher temperature range up to 250 °C.

Active Heating / Passive Cooling
Temperature range: ambient ~ 250 °C
Temperature resolution: 0.1 °C
Sample size: 15 mm × 15 mm / 15 mm in thickness
Compatible XY-scanner: 50 μm XY-scanner, 100 μm XY-scanner

Temperature control stage III

Heating stage provides higher temperature range up to 450 °C

Active Heating / Passive Cooling
Temperature range: ambient ~ 450 °C
Temperature resolution: 0.1 °C
Sample size: 15 mm × 15 mm / 15 mm in thickness
Compatible XY-scanner: 50 μm XY-scanner, 100 μm XY-scanner

Environmental Control

Most of the interesting phenomena of polymers and biological samples are observed while changing the sample environment. Park Systems provides various atmosphere control options by utilizing a glove box chamber, completely enclosing system environment.

Environmental Chamber

Environmental chamber provides controlled atmosphere for the samples sensitive to oxygen and/or water vapor. The atmosphere of the chamber is controlled by the organized functions of the humidifier, the dehumidifier combined with purging nitrogen gas into it.

Humidity control range: 2 % to 90 %
Gas inlet/outlet: 4 ports
Antechamber

Humidity Control System

Humidity control range: from 2 to 90%

Acoustic Enclosures

To accommodate appropriate working environment for AFMs, isolation from external acoustic and vibration noise as well as light noise is recommended. Park Systems provides acoustic enclosures and anti-vibration systems to make optimal operation condition for various laboratory environments.

Enhanced Acoustic Enclosure

Hermetically sealed acoustic enclosure with Steal Frame isolates the XE system from acoustic
and light noise for ultimate performance.

Inner dimension: 730 × 830 × 700 mm
Compatible with XE-70/100/150

Standard Acoustic Enclosure

Hermetically sealed acoustic enclosure blocking ambient light noise and acoustic noise.

Inner dimension: 450 × 560 × 650 mm
Compatible with XE-70/100

Acoustic Foam Box

Economic and highly effective solution for acoustic noise isolation.

Inner dimension 510 × 510 × 700 mm
Compatible with XE-70/100

Accessories

Signal Access Module

Signal access module (SAM) is used for extending the usability of AFM in experiments by transferring signals to and from external instruments. SAM enables access to various AFM signals, even to the low level signals, and maps external signals synchronously.

Outputs

Scanner driving signals for the XY and Z-scanner
Position signals for the XY and Z-scanner
Cantilever deflection signals of the vertical and the lateral movement
Bias signals for the sample and the cantilever
Modulation signal for True Non-Contact mode

Inputs

6 auxiliary input signals to the system
Driving signal for XE-AFM

Photon Counter

Photons produced by the laser excitation in NSOM experiment is delivered to the photon detector such as PMT or APD. The photon signal from the photon detector is transferred to the photon counter, whose counting is recorded as NSOM data with AFM data synchronously.

2 input channels
Maximum counting per AFM pixel: 2¹⁶
Minimum pulse width: 10 nsec
Time constant: 1 μsec ~ 2²⁴ μsec

Magnetic Field Generator

The magnetic field generator is used for applying external magnetic field to the sample. The field can be changed from -300 gauss to 300 gauss, and is parallel to the sample surface. The change in magnetic structure by the varying field can be observed by magnetic force microscopy (MFM).

Applicable field: -300 gauss ~ 300 gauss
Field direction: parallel to the sample surface

Chip Carrier

Standard chip carrier
Ceramic chip carrier for SThM
Teflon coated chip carrier for EC-Cell
Ceramic chip carrier for SCM
Teflon coated chip carrier for Conductive AFM

Non-magnetic Sample Holder

The magnetic field from the standard sample holder may cause unintended result in delicate MFM measurement. To avoid this, non-magnetic sample holder is provided.

Vacuum Chuck

For secure loading of samples, Park Systems provides a vacuum chuck. The chuck can manage 2 inch, 4 inch, and/or 6 inch wafers, and can be offered as a customized version.