The XE-Series can perform a full range of both standard and advanced functional SPM modes. Moreover, its versatile and elegant platform can be configured for diverse customized needs while utilizing all the standard XE features and benefits.
Stoma, which regulates the gas exchange in plants, is imaged by AFM. The scan size is 45 µm.
Current map of a polymer film
A ferroelectric copolymer film is deposited on top of the silver film on glass. From the topography, the film does not seem to have much difference. When seen by Conductive AFM, the film shows significant difference in conductivity. Topography (top) and Conductive AFM image (bottom). The scan size is 40 µm in the X direction.
Ion implanted pattern on silicon wafer
Ion implanted pattern on silicon wafer is imaged by SCM (scanning capacitance microscopy). By measuring capacitance variation between the cantilever and the sample, SCM acquire the dopant profile from the results. The topography (left) shows the patterns on the silicon wafer. The SCM amplitude (middle) data shows the density of dopant, and the SCM phase (right) data shows the polarity of the dopant. Scan size is 10 µm.
NiO film
Grains of NiO film shows different electric property when measured with Conductive AFM.
The acquired current map (right) shows the variation among the grains. Scan size is 1 µm.
Shape of MEMS device
The dimension of MEMS device was observed by XE-100. The depth (black part in the middle) of the device pattern is as deep as 1 µm. The scan size is 45 µm
Stent
Ag nano-particles
SIBS TET
Collagen
Zirconium alloy
The surface of Zr (zirconium) alloy is imaged. Using True Non-Contact mode, the fine structure of the surface is revealed. The scanning size is 3 µm (left) and 1 µm (right), respectively.
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