Accurate AFM Results by Crosstalk Elimination (XE)

Artifact Free Imaging

Low residual bow
Results less dependent on scan location
No need for software processing (raw data)
Accurate height measurements and sample imaging

Flat XY Scan Without Scanner Bowing

The Crosstalk Elimination (XE) fundamentally removes the scanner bowing, hence attaining flat XY scan with out-of-plane motion less than 1 nm regardless of scan locations, scan rates, and scan sizes. It shows no background curvature even on scans of the flattest samples such as that of an optical flat as shown in the figure, also with various scan offsets. Thus, the XE-AFM enables very accurate height measurement and precision nanometrology for the most challenging problems in research and industry.

Highly Linear and Orthogonal XY Scan

The flexure XY scanner decouples the X and Y scan motion so that the coupling between X and Y movement is minimized regardless of scan locations, scan rates, and scan sizes. Position sensors provide linear feedback control for the high accuracy, high precision measurements.

Non-destructive Scan

Less tip wear for prolonged high-resolution imaging
Minimized sample damage or modification
Immunity from parameter-dependent results
Imaging of soft sample surface

True Non-Contact Mode^TM is Now a Reality

True Non-Contact Mode^TM, one of the distinctive advantages only realized by Park Systems’ Crosstalk Eliminated (XE) AFM, is a powerful method that enables AFM users to image and measure samples. In True Non-Contact Mode^TM, the tip-sample distance is successfully maintained at a few nanometers in the net attractive regime of inter-atomic force. The small amplitude of tip oscillation minimizes the tip-sample interaction, resulting in superb tip preservation and negligible sample modification.

Longer Tip Life and Less Sample Damage

The sharp end of an AFM tip is so brittle that once it touches a sample, it becomes instantly blunt and limits the resolution of an AFM and reduces the quality of the image. For softer samples, the tip will damage the sample and also result in inaccuracies of sample height measurements. Consequently, preserving tip integrity enables consistent high resolution and accurate data. True Non-Contact Mode^TM of the XE-AFM superbly preserves the tip, resulting in much longer tip life and less sample damage. The figure, displayed in 1:1 aspect ratio, shows the unprocessed raw data image of a shallow trench isolation sample imaged by the XE-AFM, whose depth is also confirmed by scanning electron microscope (SEM). The same tip used in the imaging of the sample shows no tip wear even after taking 20 images.