Crosstalk Elimination

Park AFM provides very accurate height measurement and precision nanometrology without the need for software post-processing. That is made possible by its unique Crosstalk Elimination technology. Park's Crosstalk Elimination removes scanner bow-a background curvature that appears on most other AFM scans even on flattest samples such as that of an optical flat, and even with various scan offsets. Park's Crosstalk Elimination allows flat XY scan imaging regardless of scan location, scan rate, and scan size.

Two Independent Flexure Scanners for Sample and Probe

Park¡¯s innovative scanner design provides easy and wide access to the tip and sample. Two independent flexure scanners are utilized to attain flat XY scans with out-of-plan motion less than 1 nm regardless of scan location, rate, and size. Independent scanners are the key to Park¡¯s Crosstalk Elimination Technology by:

	Minimizing background curvature and scanner bow Sample movement by XY scanner Probe movement by Z scanner
Such a unique mechanism and design fundamentally removes the background curvature and scanner bow prevalent with other AFM products for a wide range of sample sizes.

Below image shows Park AFM's highly linear and orthogonal XY scan.

Industry Leading Z Scan Linearity

With Park's Crosstalk Elimination, the flexure-guided Z scanner is decoupled from the X and Y scan motion. Hence, the Z scan motion can be kept in a precise straight line. The Z scan linearity of the flexure guided scanner is less than 0.015%, enabling an accurate and precise angle measurement in the nanoscale.

Park AFM provides the most accurate nano imaging data with its Crosstalk Elimination technology.  It eliminates surface curvature for a wide variety of sample type and size, and it provides a flat, highly linear and orthogonal XY scan, with an accurate and precise angle measurement.