mode : Non-contact mode
Tip : AR5
Scan rate : 0.5hz
Scan size : 2um x 2um
Pixel : 512 x 512
Narrow and deep trench with high aspect ratio
Narrow and deep trench with high aspect ratio (60 nm width, 140 nm depth)
mode : Non-contact mode
Tip : AR5
Scan rate : 0.5hz
Scan size : 2um x 2um
Pixel : 512 x 512
Narrow and deep trench with high aspect ratio (60 nm width, 140 nm depth)
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Atomic Force Microscope Gallery
