Automated Industrial AFM for In-line Wafer Inspection and Metrology.

It increases yield while delivering the highest resolution and the lowest gauge sigma value for repeatability and reproducibility.

The XE-Wafer is a fully automated industrial AFM that can measure surface roughness, trench width, depth and angle measurements on 200mm & 300mm wafers with precision in a production environment.

Process engineers in hard disk drive and semiconductor industries need to increase in-line inspection accuracy of nanoscale metrology while cutting measurement time.