The Problems and Limitations of Conventional AFM |
Scanner Bowing : Flat Scan Is Not Possible!
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The conventional AFM uses a piezoelectric tube for the x-y-z scanner, where x-y motion relies
on the bending of the tube. The bending motion, however, introduces background curvature
and therefore causes z position errors. Conventional systems regularly use software flattening
to hide the background curvature; this can be an impossible task since the amount of curvature
depends not only on scan size and scan speed, but also on x-y offset, z position, etc. Therefore,
even after software flattening, a flat surface does not “look” flat as shown in the figure. |
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Slow Z-Servo Response : Non-Contact
Mode is Not Possible! |
The tube scanner is a slow actuator with highly limited Z-scan
bandwidth of only 500 Hz or so. Therefore, the Z-servo response
is slow and it is not possible to implement Non-Contact
Mode, a critical requirement for preservation of of sharp
tips and non-destructive imaging of soft biological samples. |
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XE Technology: Park Systems’ Answer to Conventional AFM’s Problems |
The problems and limitations of a conventional AFM calls for a completely new approach in the design of an AFM.
Park Systems developed the Crosstalk Eliminated (XE) AFM which fundamentally and successfully resolves these problems. |
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| Mechanical
Design |
Features | Advantages |
| Completely Decoupled XY and Z-Scanners |
XY-Scanner moves a sample only
and Z-Scanner Drives a Probe |
A Flat XY Scan without Scanner Bowing |
| 2D XY Flexure Scanner |
Minimal Runout |
Highly Linear and Orthogonal XY Scan |
| High Force Z-Scanner |
Large Z Servo Bandwidth |
Enabling True Non-Contact Mode |
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