Crosstalk Elimination

Park's AFM provides very accurate height measurement and precision nanometrology without the need for software post-processing. That is made possible by its unique Crosstalk Elimination technology. Park's Crosstalk Elimination removes scanner bow-a background curvature that appears on most other AFM scans even on flattest samples such as that of an optical flat, and even with various scan offsets. Park's Crosstalk Elimination allows flat XY scan imaging regardless of scan location, scan rate, and scan size.

Park’s AFM utilizes two independent flexure scanners for sample and probe for its Crosstalk Elimination technology:

	XY scanner scans only sample Z scanner scans only probe Provides easy and wide access to tip/sample
Such unique mechanism and design fundamentally removes the background curvature prevalent in other AFM products, for a wide range of sample sizes.

Below is a picture of Park's Flat XY Scan without any scanner bowing.

The Crosstalk Elimination attains flat XY scans with out-of-plane motion less than 1 nm regardless of scan location, scan rate, and scan size.Furthermore its flexure XY scanner decouples the X and Y scan motion so that the coupling between X and Y movement is minimized at any scan location, rate, and size. Position sensors provide linear feedback control for the high accuracy, high precision measurements.

Below image shows Park's highly linear and orthogonal XY Scan.

The flexure XY scanner decouples the X and Y scan motion so that the coupling between X and Y movement is minimized regardless of scan locations, scan rates, and scan sizes. Position sensors provide linear feedback control for the high accuracy, high precision measurements.

Industry Leading Z Scan Linearity

With Park's Crosstalk Elimination, the flexure-guided Z scanner is decoupled from the X and Y scan motion. Hence, the Z scan motion can be kept in a precise straight line. The Z scan linearity of the flexure guided scanner is less than 0.015%, enabling an accurate and precise angle measurement in the nanoscale.

Park's AFM provides the most accurate nano imaging data with its Crosstalk Elimination technology. It eliminates surface curvature for a wide variety of sample type and size, and it provides a flat, highly linear and orthogonal xy scan, with an accurate and precise angle measurement.